Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5834767 | Surface position detecting system and projection exposure apparatus using the same | Masanobu Hasegawa, Minoru Yoshii | 1998-11-10 |
| 5777744 | Exposure state detecting system and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Seiji Takeuchi | 1998-07-07 |
| 5771416 | Camera having simple and inexpensive finder field frame switching mechanism | Hiromu Mukai, Hideki Nagata | 1998-06-23 |
| 5767962 | Inspection system and device manufacturing method using the same | Masayuki Suzuki, Noriyuki Nose, Minoru Yoshii, Toshihiko Tsuji, Seiji Takeuchi | 1998-06-16 |
| 5742386 | Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same | Noriyuki Nose, Minoru Yoshii, Toshihiko Tsuji, Seiji Takeuchi | 1998-04-21 |
| 5652657 | Inspection system for original with pellicle | Minoru Yoshii, Michio Kohno, Seiya Miura, Toshihiko Tsuji, Seiji Takeuchi | 1997-07-29 |
| 5610715 | Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head | Minoru Yoshii, Seiji Takeuchi | 1997-03-11 |
| 5585918 | Foreign particle inspecting system | Seiji Takeuchi, Toshihiko Tsuji | 1996-12-17 |
| 5576889 | Real-image zoom finder optical system | — | 1996-11-19 |
| 5486919 | Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern | Toshihiko Tsuji, Seiji Takeuchi, Minoru Yoshii, Noriyuki Nose, Tetsuzo Mori | 1996-01-23 |
| 5461474 | Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same | Minoru Yoshii, Noriyuki Nose, Masayuki Suzuki, Toshihiko Tsuji, Seiji Takeuchi | 1995-10-24 |