Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10297487 | Element chip manufacturing method | Shogo Okita, Noriyuki Matsubara, Akihiro Itou | 2019-05-21 |
| 10297489 | Plasma processing method and plasma processing apparatus | Shogo Okita, Akihiro Itou | 2019-05-21 |
| 10276423 | Method of manufacturing element chip | Shogo Okita, Koji Tamura, Akihiro Itou, Noriyuki Matsubara | 2019-04-30 |
| 10242914 | Element chip manufacturing method | Shogo Okita, Noriyuki Matsubara, Akihiro Itou | 2019-03-26 |
| 10236266 | Element chip manufacturing method | Shogo Okita, Akihiro Itou, Katsumi Takano, Mitsuru Hiroshima | 2019-03-19 |
| 10177063 | Element chip and method for manufacturing the same | Bunzi Mizuno, Mitsuru Hiroshima, Shogo Okita, Noriyuki Matsubara | 2019-01-08 |
| 10147646 | Manufacturing process of element chip | Hidehiko Karasaki, Hidefumi SAEKI | 2018-12-04 |
| 10049933 | Element chip manufacturing method | Shogo Okita, Akihiro Itou, Katsumi Takano, Mitsuru Hiroshima | 2018-08-14 |
| 10037891 | Manufacturing method of element chip | Shogo Okita | 2018-07-31 |
| 10026619 | Plasma treatment method | Shogo Okita | 2018-07-17 |
| 9953906 | Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure | Shogo Okita, Noriyuki Matsubara | 2018-04-24 |
| 9941132 | Plasma processing apparatus and plasma processing method | Shogo Okita, Noriyuki Matsubara | 2018-04-10 |
| 9922899 | Method of manufacturing element chip and element chip | Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima, Mitsuhiro Okune | 2018-03-20 |
| 9911638 | Plasma processing apparatus and plasma processing method | Shogo Okita, Noriyuki Matsubara | 2018-03-06 |
| 9911677 | Element chip and method for manufacturing the same | Bunzi Mizuno, Mitsuru Hiroshima, Shogo Okita, Noriyuki Matsubara | 2018-03-06 |
| 9905452 | Method of forming mask pattern, method of processing substrate, and method of fabricating element chips | Mitsuru Hiroshima | 2018-02-27 |
| 9859144 | Method of manufacturing element chip | Shogo Okita, Noriyuki Matsubara | 2018-01-02 |
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Noriyuki Matsubara, Hideo Kanou, Mitsuru Hiroshima, Syouzou Watanabe, Toshihiro Wada | 2017-10-03 |
| 9780021 | Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure | Shogo Okita, Noriyuki Matsubara | 2017-10-03 |
| 9698052 | Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chip | Shogo Okita, Noriyuki Matsubara | 2017-07-04 |
| 9698073 | Method of manufacturing element chip and element chip | Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima, Mitsuhiro Okune | 2017-07-04 |
| 9653334 | Plasma processing apparatus and method | Noriyuki Matsubara, Mitsuru Hiroshima | 2017-05-16 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Tetsuhiro Iwai, Mitsuru Hiroshima | 2017-02-28 |
| 9570272 | Plasma processing apparatus and plasma processing method | Shogo Okita, Noriyuki Matsubara | 2017-02-14 |
| 9431263 | Plasma processing method and apparatus | Noriyuki Matsubara, Mitsuru Hiroshima | 2016-08-30 |