Issued Patents All Time
Showing 76–100 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478936 | Anode assembly for plating and planarizing a conductive layer | Rimma Volodarsky, Konstantin Volodarsky, Cyprian Emeka Uzoh, Douglas W. Young | 2002-11-12 |
| 6471847 | Method for forming an electrical contact with a semiconductor substrate | Bulent M. Basol | 2002-10-29 |
| 6468139 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Konstantin Volodarsky, Jalal Ashjaee, Douglas W. Young | 2002-10-22 |
| 6464571 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Konstantin Volodarsky, Jalal Ashjaee, Douglas W. Young | 2002-10-15 |
| 6413388 | Pad designs and structures for a versatile materials processing apparatus | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-07-02 |
| 6413403 | Method and apparatus employing pad designs and structures with improved fluid distribution | Paul Lindquist, Bulent M. Basol, Cyprian Emeka Uzoh | 2002-07-02 |
| 6409904 | Method and apparatus for depositing and controlling the texture of a thin film | Cyprian Emeka Uzoh | 2002-06-25 |
| 6402925 | Method and apparatus for electrochemical mechanical deposition | — | 2002-06-11 |
| 6398625 | Apparatus and method of polishing with slurry delivery through a polishing pad | — | 2002-06-04 |
| 6354916 | Modified plating solution for plating and planarization and process utilizing same | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-03-12 |
| 6355153 | Chip interconnect and packaging deposition methods and structures | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-03-12 |
| 6352623 | Vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw Nagorski, Rimma Volodarsky, Douglas W. Young, Cyprian Emeka Uzoh | 2002-03-05 |
| 6328872 | Method and apparatus for plating and polishing a semiconductor substrate | Cyprian Emeka Uzoh | 2001-12-11 |
| 6251235 | Apparatus for forming an electrical contact with a semiconductor substrate | Bulent M. Basol | 2001-06-26 |
| 6248398 | Coater having a controllable pressurized process chamber for semiconductor processing | Alex Lurye | 2001-06-19 |
| 6231427 | Linear polisher and method for semiconductor wafer planarization | David E. Weldon | 2001-05-15 |
| 6207572 | Reverse linear chemical mechanical polisher with loadable housing | — | 2001-03-27 |
| 6179690 | Substrate polishing apparatus | — | 2001-01-30 |
| 6176992 | Method and apparatus for electro-chemical mechanical deposition | — | 2001-01-23 |
| 6159080 | Chemical mechanical polishing with a small polishing pad | — | 2000-12-12 |
| 6103628 | Reverse linear polisher with loadable housing | — | 2000-08-15 |
| 5944582 | Chemical mechanical polishing with a small polishing pad | — | 1999-08-31 |
| 5938504 | Substrate polishing apparatus | — | 1999-08-17 |
| 5934979 | Chemical mechanical polishing apparatus using multiple polishing pads | — | 1999-08-10 |
| 5692947 | Linear polisher and method for semiconductor wafer planarization | David E. Weldon | 1997-12-02 |