Issued Patents All Time
Showing 101–104 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650039 | Chemical mechanical polishing apparatus with improved slurry distribution | — | 1997-07-22 |
| 5593344 | Wafer polishing machine with fluid bearings and drive systems | David E. Weldon, Boguslaw Nagorski | 1997-01-14 |
| 5575707 | Polishing pad cluster for polishing a semiconductor wafer | David E. Weldon | 1996-11-19 |
| 5558568 | Wafer polishing machine with fluid bearings | David E. Weldon, Boguslaw Nagorski | 1996-09-24 |