Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5793041 | Method for correcting astigmatism and focusing in charged particle optical lens-barrel | Munehiro Ogasawara, Kazunori Onoguchi, Hideo Wakamori | 1998-08-11 |
| 5760410 | Electron beam lithography apparatus and method | Kazuto Matsuki, Toshio Yamaguchi, Ryoichi Yoshikawa | 1998-06-02 |
| 5707501 | Filter manufacturing apparatus | Soichi Inoue, Tadahito Fujisawa, Shin Ito, Takashi Sato, Keiji Horioka | 1998-01-13 |
| 5627626 | Projectin exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Shin Ito, Takashi Sato, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Shin Ito, Takashi Sato, Keiji Horioka | 1997-04-15 |
| 5047646 | Method of correcting astigmatism of variable shaped beam | Kiyoshi Hattori, Eiji Nishimura, Naotaka Ikeda, Hirotsugu Wada | 1991-09-10 |