Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5025306 | Assembly of semiconductor chips | James Drumm | 1991-06-18 |
| 4891087 | Isolation substrate ring for plasma reactor | Cecil J. Davis, John E. Spencer, Thomas D. Bonifield, Rhett B. Jucha, William J. Stiltz +2 more | 1990-01-02 |
| 4659413 | Automated single slice cassette load lock plasma reactor | Cecil J. Davis, John E. Spencer, Rhett B. Jucha, Frederick W. Brown, Stanford P. Kohan | 1987-04-21 |
| 4657617 | Anodized aluminum substrate for plasma etch reactor | John E. Spencer | 1987-04-14 |
| 4657618 | Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate | John E. Spencer, Dan Hockersmith, Randall C. Hildenbrand, John I. Jones, William S. Jaspersen | 1987-04-14 |
| 4657621 | Low particulate vacuum chamber input/output valve | Louis E. Peters, Lowell E. Simmons | 1987-04-14 |
| 4654106 | Automated plasma reactor | Cecil J. Davis, John E. Spencer | 1987-03-31 |