Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947424 | Composition for forming anti-reflective coat | Shinya Arase, Ken-ichi Mizusawa, Keisuke Nakayama | 2011-05-24 |
| 7846638 | Composition for forming anti-reflective coating for use in lithography | Ken-ichi Mizusawa, Tomoyuki Enomoto, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2010-12-07 |
| 7842620 | Method for manufacturing semiconductor device using quadruple-layer laminate | Satoshi Takei, Makoto Nakajima, Yasushi Sakaida, Hikaru Imamura, Keisuke Hashimoto | 2010-11-30 |
| 7816067 | Coating-type underlayer coating forming composition for lithography containing naphthalene resin derivative | Tomoyuki Enomoto, Takahiro Sakaguchi | 2010-10-19 |
| 7794919 | Composition for forming underlayer coating for lithography containing epoxy compound and carboxylic acid compound | — | 2010-09-14 |
| 7790356 | Condensation type polymer-containing anti-reflective coating for semiconductor | Rikimaru Sakamoto, Yoshiomi Hiroi, Daisuke Maruyama | 2010-09-07 |
| 7595144 | Sulfonate-containing anti-reflective coating forming composition for lithography | Tadashi Hatanaka, Shigeo Kimura | 2009-09-29 |
| 7501229 | Anti-reflective coating containing sulfur atom | Yoshiomi Hiroi, Keisuke Nakayama, Rikimaru Sakamoto | 2009-03-10 |
| 7425399 | Composition for forming anti-reflective coating for use in lithography | Ken-ichi Mizusawa, Tomoyuki Enomoto, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2008-09-16 |
| 7425403 | Composition for forming anti-reflective coating for use in lithography | Shinya Arase, Ken-ichi Mizusawa | 2008-09-16 |
| 7332266 | Composition for forming anti-reflective coating for use in lithography | Shinya Arase, Ken-ichi Mizusawa | 2008-02-19 |
| 7326509 | Composition for forming anti-reflective coating for use in lithography | Shinya Arase, Ken-ichi Mizusawa | 2008-02-05 |
| 7226721 | Underlayer coating forming composition for lithography containing compound having protected carboxyl group | Satoshi Takei, Yasushi Sakaida, Tetsuya Shinjo | 2007-06-05 |
| 6927266 | Bottom anti-reflective coat forming composition for lithography | Shinya Arase, Ken-ichi Mizusawa | 2005-08-09 |