Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947424 | Composition for forming anti-reflective coat | Takahiro Kishioka, Shinya Arase, Keisuke Nakayama | 2011-05-24 |
| 7846638 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Tomoyuki Enomoto, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2010-12-07 |
| 7517633 | Composition for forming gap-filling material for lithography | Satoshi Takei, Yasuhisa Sone | 2009-04-14 |
| 7425399 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Tomoyuki Enomoto, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2008-09-16 |
| 7425347 | Composition for forming anti-reflective coating for use in lithography | Satoshi Takei, Yoshiaki Yasumi | 2008-09-16 |
| 7425403 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Shinya Arase | 2008-09-16 |
| 7332266 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Shinya Arase | 2008-02-19 |
| 7326509 | Composition for forming anti-reflective coating for use in lithography | Shinya Arase, Takahiro Kishioka | 2008-02-05 |
| 7309560 | Composition for forming anti-reflective coating | Rikimaru Sakamoto | 2007-12-18 |
| 6927266 | Bottom anti-reflective coat forming composition for lithography | Shinya Arase, Takahiro Kishioka | 2005-08-09 |
| 6680160 | Halogenated anti-reflective coatings | Tomoyuki Enomoto, Shin-Ya Arase, Rama Puligadda | 2004-01-20 |
| 6495305 | Halogenated anti-reflective coatings | Tomoyuki Enomoto, Shin-Ya Arase, Rama Puligadda | 2002-12-17 |
| 6444320 | Thermosetting anti-reflective coatings for full-fill dual damascene process | Satoshi Takei, Yasuhisa Sone | 2002-09-03 |