Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8226865 | Aluminum-nitride-based composite material, method for manufacturing the same, and member for a semiconductor manufacturing apparatus | Yoshimasa Kobayashi, Akira Goto, Yuji Katsuda | 2012-07-24 |
| 7629282 | Aluminum nitride sintered body, semiconductor manufacturing device and method of manufacturing | Jun Yoshikawa, Yoshimasa Kobayashi | 2009-12-08 |
| 7605102 | Aluminum nitride ceramic and semiconductor manufacturing member | Yoshimasa Kobayashi, Toru Hayase | 2009-10-20 |
| 7592280 | Aluminum nitride sintered body, method of manufacturing aluminum nitride sintered body, and member | Yoshimasa Kobayashi | 2009-09-22 |
| 7422992 | Aluminum nitride sintered body, semiconductor manufacturing member, and method of manufacturing aluminum nitride sintered body | Naomi Teratani | 2008-09-09 |
| 7332027 | Method for manufacturing aluminum nitride single crystal | Yoshimasa Kobayashi, Toru Hayase | 2008-02-19 |
| 7288496 | Aluminum nitride sintered body and method of evaluation for the same | Yoshimasa Kobayashi, Toru Hayase | 2007-10-30 |
| 7250215 | Aluminum nitride sintered body containing carbon fibers and method of manufacturing the same | Jun Yoshikawa, Hiroya SUGIMOTO | 2007-07-31 |
| 7229940 | Dense cordierite based sintered body and method of manufacturing the same | Naomi Teratani, Hiroaki Sakai | 2007-06-12 |
| 7211216 | Aluminum nitride ceramic, semiconductor manufacturing member, and manufacturing method for aluminum nitride ceramic | Yoshimasa Kobayashi, Toru Hayase | 2007-05-01 |
| 7122490 | Aluminum nitride materials and members for use in the production of semiconductors | Yoshimasa Kobayashi, Toru Hayase, Naomi Teratani, Jun Yoshikawa | 2006-10-17 |
| 7042697 | Electrostatic chucks and electrostatically attracting structures | Hideyoshi Tsuruta | 2006-05-09 |
| 6491571 | Substrate for use in wafer attracting apparatus and manufacturing method thereof | Masashi Ohno, Takahiro Inoue, Kouji Kato | 2002-12-10 |
| 6471779 | Gas feed ceramic structure for semiconductor-producing apparatus | Akifumi Nishio, Masahiro Hori | 2002-10-29 |
| 6432208 | Plasma processing apparatus | Satoru Kawakami, Katsuhiko Iwabuchi, Ryo Kuwajima, Ryusuke Ushikoshi, Tetsuya Kawajiri | 2002-08-13 |
| 6292346 | Equipment for holding a semiconductor wafer, a method for manufacturing the same, and a method for using the same | Masashi Ohno, Hirokazu Ichikawa, Tetsuya Kawajiri | 2001-09-18 |
| 6174583 | Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member | Yukimasa Mori, Yuki Bessho, Hiromichi Kobayashi | 2001-01-16 |
| 6166432 | Substrate for use in wafer attracting apparatus and manufacturing method thereof | Masashi Ohno, Takahiro Inoue, Kouji Kato | 2000-12-26 |
| 6134096 | Electrostatic chuck | Masashi Ohno, Ryusuke Ushikoshi | 2000-10-17 |
| 5998320 | Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member | Yukimasa Mori, Yuki Bessho, Hiromichi Kobayashi | 1999-12-07 |
| 5946183 | Electrostatic chuck | Masashi Ohno, Ryusuke Ushikoshi | 1999-08-31 |
| 4959258 | Joined metal-ceramic assembly method of preparing the same | Akihiko Yoshida | 1990-09-25 |