Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8366893 | Pumping electrode of gas sensor, method of manufacturing conductive paste, and gas sensor | Shinji Fujisaki, Aya Sato, Sumiko Horisaka | 2013-02-05 |
| 6174583 | Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member | Naohito Yamada, Yuki Bessho, Hiromichi Kobayashi | 2001-01-16 |
| 6001760 | Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck | Yuji Katsuda, Michio Takahashi, Yuki Bessho | 1999-12-14 |
| 5998320 | Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member | Naohito Yamada, Yuki Bessho, Hiromichi Kobayashi | 1999-12-07 |
| 5908799 | Apparatus for producing semiconductor using aluminum nitride bodies as substrates | Hiromichi Kobayashi, Yuki Bessho | 1999-06-01 |
| 5728635 | Aluminum nitride sintered bodies | Hiromichi Kobayashi, Yuki Bessho | 1998-03-17 |