Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362208 | Inspection method and etching system | — | 2025-07-15 |
| 11587763 | Substrate processing system, switching timing creation support device,switching timing creation support method, and substrate processing apparatus | — | 2023-02-21 |
| 7824153 | Stator vane of turbo molecular pump | Shinji Kawanishi | 2010-11-02 |
| 7390164 | Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structure | Yasushi Maejima, Yutaka Inayoshi, Shinji Kawanishi, Kou Sakurai, Hiroyuki Suda | 2008-06-24 |
| 6846538 | Composite sheet, method of preparing same, and adhesive label sheet assembly having same | Masahiro Sato, Masanaka Nagamoto | 2005-01-25 |
| 6670010 | Composite sheet, method of preparing same, and thermosensitive recording adhesive label sheet having same | Masanaka Nagamoto, Masahiro Sato | 2003-12-30 |
| 6189481 | Microwave plasma processing apparatus | — | 2001-02-20 |
| 6060427 | Thermosensitive recording material | Yasutomo Mori, Mitsuru Naruse | 2000-05-09 |
| 5911852 | Plasma processing apparatus | Katsuo Katayama, Kyouichi Komachi, Kouichi Iio | 1999-06-15 |
| 5804923 | Plasma processing apparatus having a protected microwave transmission window | Kouichi Iio, Kyouichi Komachi, Katsuo Katayama | 1998-09-08 |
| 5798544 | Semiconductor memory device having trench isolation regions and bit lines formed thereover | Shuichi Ohya, Masato Sakao, Yoshihiro Takaishi, Kiyonori Kajiyana, Shizuo Oguro +1 more | 1998-08-25 |
| 5721190 | Thermosensitive recording medium | Shuji Miyamoto, Yasutomo Mori | 1998-02-24 |
| 5677824 | Electrostatic chuck with mechanism for lifting up the peripheral of a substrate | Keiichi Harashima | 1997-10-14 |
| 5668053 | Method for fabricating multilayer semiconductor device | — | 1997-09-16 |
| 5647912 | Plasma processing apparatus | Takahiro Kaminishizono | 1997-07-15 |
| 5639309 | Plasma processing apparatus adjusted for a batch-processing of a plurality of wafers with plasma gases | — | 1997-06-17 |
| 5614025 | Plasma processing apparatus | — | 1997-03-25 |
| 5545258 | Microwave plasma processing system | Katsuo Katayama, Kyoichi Komachi, Hiroshi Mabuchi | 1996-08-13 |
| 5529632 | Microwave plasma processing system | Katsuo Katayama, Kyoichi Komachi, Hiroshi Mabuchi | 1996-06-25 |
| 5415719 | Two parallel plate electrode type dry etching apparatus | — | 1995-05-16 |