Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5911852 | Plasma processing apparatus | Katsuo Katayama, Kyouichi Komachi, Takeshi Akimoto | 1999-06-15 |
| 5804923 | Plasma processing apparatus having a protected microwave transmission window | Kyouichi Komachi, Katsuo Katayama, Takeshi Akimoto | 1998-09-08 |