Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10676839 | Electrodeposition system and electrodeposition method | Hiroyuki Nakagawa, Hiroaki Tsuji, Akira Kawanami, Shintarou Kouno, Shigetaka Tooka +1 more | 2020-06-09 |
| 7465662 | Method of making semiconductor device | Katsuhiro Uesugi, Katsuhisa Sakai | 2008-12-16 |
| 7301237 | Semiconductor device | Katsuhiro Uesugi, Katsuhisa Sakai | 2007-11-27 |
| 6091045 | Plasma processing apparatus utilizing a microwave window having a thinner inner area | Hiroshi Mabuchi, Junya Tsuyuguchi, Toshihiro Hayami, Hideo Ida, Tomomi Murakami +1 more | 2000-07-18 |
| 5951887 | Plasma processing apparatus and plasma processing method | Hiroshi Mabuchi, Toshihiro Hayami, Hideo Ida, Tomomi Murakami, Naohiko Takeda +1 more | 1999-09-14 |
| 5911852 | Plasma processing apparatus | Kyouichi Komachi, Kouichi Iio, Takeshi Akimoto | 1999-06-15 |
| 5804923 | Plasma processing apparatus having a protected microwave transmission window | Kouichi Iio, Kyouichi Komachi, Takeshi Akimoto | 1998-09-08 |
| 5545258 | Microwave plasma processing system | Kyoichi Komachi, Hiroshi Mabuchi, Takeshi Akimoto | 1996-08-13 |
| 5529632 | Microwave plasma processing system | Kyoichi Komachi, Hiroshi Mabuchi, Takeshi Akimoto | 1996-06-25 |