Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6091045 | Plasma processing apparatus utilizing a microwave window having a thinner inner area | Hiroshi Mabuchi, Junya Tsuyuguchi, Katsuo Katayama, Toshihiro Hayami, Tomomi Murakami +1 more | 2000-07-18 |
| 5951887 | Plasma processing apparatus and plasma processing method | Hiroshi Mabuchi, Toshihiro Hayami, Tomomi Murakami, Naohiko Takeda, Junya Tsuyuguchi +1 more | 1999-09-14 |