Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5788798 | Plasma processing apparatus | Hiroshi Mabuchi, Takahiro Yoshiki, Naoki Matsumoto, Shuta Kanayama, Toshiki Ebata | 1998-08-04 |
| 5645644 | Plasma processing apparatus | Hiroshi Mabuchi, Takahiro Yoshiki, Tadashi Miyamura | 1997-07-08 |
| 5545258 | Microwave plasma processing system | Katsuo Katayama, Hiroshi Mabuchi, Takeshi Akimoto | 1996-08-13 |
| 5529632 | Microwave plasma processing system | Katsuo Katayama, Hiroshi Mabuchi, Takeshi Akimoto | 1996-06-25 |