Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7390164 | Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structure | Yasushi Maejima, Yutaka Inayoshi, Shinji Kawanishi, Hiroyuki Suda, Takeshi Akimoto | 2008-06-24 |