Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6174499 | Method and apparatus for treatment of freon gas | — | 2001-01-16 |
| 5907077 | Method and apparatus for treatment of freon gas | — | 1999-05-25 |
| 5677824 | Electrostatic chuck with mechanism for lifting up the peripheral of a substrate | Takeshi Akimoto | 1997-10-14 |