Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5771094 | Film measurement system with improved calibration | Joseph R. Carter, Jennming Chen | 1998-06-23 |
| 5608526 | Focused beam spectroscopic ellipsometry method and system | Timothy R. Piwonka-Corle, Karen Scoffone, Lloyd J. LaComb, JR., Jean-Louis Stehle, Dorian Zahorski +1 more | 1997-03-04 |
| 5581350 | Method and system for calibrating an ellipsometer | Philip D. Flanner, III, Kiron Balkrishna Malwankar, Jennming Chen | 1996-12-03 |