Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733661 | Ultrapure water producing apparatus | Masaharu Hama | 2004-05-11 |
| 6009545 | System for analyzing a failure in a semiconductor wafer by calculating correlation coefficient between collated data of defects per prescribed unit and failures per prescribed unit | Toshikazu Tsutsui, Tohru Koyama, Fumihito Ohta, Masaaki Furuta, Yohji Mashiko | 1999-12-28 |
| 5942763 | Apparatus and method for identifying an identification mark of a wafer | — | 1999-08-24 |
| 5928786 | Monocrystalline silicon wafer and method of thermally oxidizing a surface thereof | Yasuhiro Kimura | 1999-07-27 |
| 5876819 | Crystal orientation detectable semiconductor substrate, and methods of manufacturing and using the same | Yasuhiro Kimura, Keiji Yamauchi, Hidekazu Yamamoto, Shigehisa Yamamoto, Masafumi Katsumata +1 more | 1999-03-02 |
| 5844850 | Apparatus for analyzing a failure in a semiconductor wafer and method thereof | Toshikazu Tsutsui, Tohru Koyama, Fumihito Ohta, Masaaki Furuta, Yohji Mashiko | 1998-12-01 |
| 5511569 | Cleaning apparatus | — | 1996-04-30 |
| 5331193 | Semiconductor device resistant to slip line formation | — | 1994-07-19 |
| 4786473 | Apparatus for measuring impurities in pure water | Katsuhikoa Tamura, Takaaki Fukumoto | 1988-11-22 |
| 4765963 | Apparatus for measuring impurities in water | Katsuhiko Tamura, Takaaki Fukumoto | 1988-08-23 |
| 4569224 | Device for measuring the absolute value of the density of salts in atmosphere | Takaaki Fukumoto, Masaharu Hama, Motonori Yanagi | 1986-02-11 |