Issued Patents All Time
Showing 126–150 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6207630 | Processing compositions and methods of using same | — | 2001-03-27 |
| 6204175 | Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer | Gilbert Lai, Gurtej S. Sandhu, Ravi Iyer | 2001-03-20 |
| 6197628 | Ruthenium silicide diffusion barrier layers and methods of forming same | Eugene P. Marsh | 2001-03-06 |
| 6159855 | Organometallic compound mixtures in chemical vapor deposition | — | 2000-12-12 |
| 6149828 | Supercritical etching compositions and method of using same | — | 2000-11-21 |
| 6136703 | Methods for forming phosphorus- and/or boron-containing silica layers on substrates | — | 2000-10-24 |
| 6133161 | Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands | Stefan Uhlenbrock | 2000-10-17 |
| 6133159 | Methods for preparing ruthenium oxide films | Eugene P. Marsh | 2000-10-17 |
| 6130160 | Methods, complexes and system for forming metal-containing films | — | 2000-10-10 |
| 6127192 | Complexes having tris (pyrazolyl) borate ligands for forming films | Stefan Uhlenbrock | 2000-10-03 |
| 6114557 | Methods for preparing ruthenium and osmium compounds | Stefan Uhlenbrock | 2000-09-05 |
| 6110529 | Method of forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more | 2000-08-29 |
| 6095161 | Processing and post-processing compositions and methods of using same | — | 2000-08-01 |
| 6087270 | Method of patterning substrates | Alan R. Reinberg, Kevin G. Donohoe | 2000-07-11 |
| 6074945 | Methods for preparing ruthenium metal films | Eugene P. Marsh | 2000-06-13 |
| 6063705 | Precursor chemistries for chemical vapor deposition of ruthenium and ruthenium oxide | — | 2000-05-16 |
| 6030491 | Processing compositions and methods of using same | — | 2000-02-29 |
| 6020511 | Methods, complexes, and systems for forming metal-containing films | Brenda D. Wanner | 2000-02-01 |
| 6010969 | Method of depositing films on semiconductor devices by using carboxylate complexes | — | 2000-01-04 |
| 5962716 | Methods for preparing ruthenium and osmium compounds | Stefan Uhlenbrock | 1999-10-05 |
| 5948322 | Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom | Thomas H. Baum, Gregory T. Stauf, Daniel Studebaker | 1999-09-07 |
| 5924012 | Methods, complexes, and system for forming metal-containing films | — | 1999-07-13 |
| 5919522 | Growth of BaSrTiO.sub.3 using polyamine-based precursors | Thomas H. Baum, Gregory T. Stauf, Peter S. Kirlin, Duncan W. Brown, Robin A. Gardiner +1 more | 1999-07-06 |
| 5916690 | Metal carboxylate complexes for formation of metal-containing films on semiconductor devices | — | 1999-06-29 |
| 5908947 | Difunctional amino precursors for the deposition of films comprising metals | — | 1999-06-01 |