Issued Patents All Time
Showing 151–162 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5874131 | CVD method for forming metal-containing films | Brenda D. Wanner | 1999-02-23 |
| 5866205 | Process for titanium nitride deposition using five- and six-coordinate titanium complexes | Wing-Cheong Gilbert Lai | 1999-02-02 |
| 5856236 | Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer | Gilbert Lai, Gurtej S. Sandhu, Ravi Iyer | 1999-01-05 |
| 5820664 | Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same | Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more | 1998-10-13 |
| 5763633 | Metal carboxylate complexes for formation of metal-containing films on semiconductor devices | — | 1998-06-09 |
| 5695815 | Metal carboxylate complexes for formation of metal-containing films on semiconductor devices | — | 1997-12-09 |
| 5679815 | Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same | Peter S. Kirlin, Douglas Gordon, Timothy E. Glassman | 1997-10-21 |
| 5677002 | Chemical vapor deposition of tantalum- or niobium-containing coatings | Peter S. Kirlin, Douglas Gordon, Timothy E. Glassman | 1997-10-14 |
| 5659057 | Five- and six-coordinate precursors for titanium nitride deposition | — | 1997-08-19 |
| 5635022 | Silicon oxide removal in semiconductor processing | — | 1997-06-03 |
| 5607722 | Process for titanium nitride deposition using five-and six-coordinate titanium complexes | Wing-Cheong Gilbert Lai | 1997-03-04 |
| 5326892 | Bimetallic alkoxide reagents and method of making the same | — | 1994-07-05 |