Issued Patents All Time
Showing 101–125 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445023 | Mixed metal nitride and boride barrier layers | Donald L. Westmoreland | 2002-09-03 |
| 6444041 | Methods, complexes, and system for forming metal-containing films | — | 2002-09-03 |
| 6444818 | Metal complexes with chelating C-, N-donor ligands for forming metal-containing films | Stefan Uhlenbrock | 2002-09-03 |
| 6426292 | Methods for forming iridium and platinum containing films on substrates | — | 2002-07-30 |
| 6402126 | Method and apparatus for vaporizing liquid precursors and system for using same | David R. Atwell | 2002-06-11 |
| 6375754 | Processing compositions and methods of using same | — | 2002-04-23 |
| 6368518 | Methods for removing rhodium- and iridium-containing films | — | 2002-04-09 |
| 6368398 | Method of depositing films by using carboxylate complexes | — | 2002-04-09 |
| 6352580 | Complexes having tris(pyrazolyl)borate ligands for forming films | Stefan Uhlenbrock | 2002-03-05 |
| 6350686 | Organometallic compound mixtures in chemical vapor deposition | — | 2002-02-26 |
| 6348412 | Organometallic compound mixtures in chemical vapor deposition | — | 2002-02-19 |
| 6329286 | Methods for forming conformal iridium layers on substrates | — | 2001-12-11 |
| 6326505 | Methods, complexes, and system for forming metal-containing films | — | 2001-12-04 |
| 6319832 | Methods of making semiconductor devices | Stefan Uhlenbrock | 2001-11-20 |
| 6306217 | Metal complexes with chelating C-,N-donor ligands for forming metal-containing films | Stefan Uhlenbrock | 2001-10-23 |
| 6280793 | Electrostatic method and apparatus for vaporizing precursors and system for using same | David R. Atwell | 2001-08-28 |
| 6281125 | Methods for preparing ruthenium oxide films | Eugene P. Marsh | 2001-08-28 |
| 6281124 | Methods and systems for forming metal-containing films on substrates | — | 2001-08-28 |
| 6273951 | Precursor mixtures for use in preparing layers on substrates | — | 2001-08-14 |
| 6244575 | Method and apparatus for vaporizing liquid precursors and system for using same | David R. Atwell | 2001-06-12 |
| 6242165 | Supercritical compositions for removal of organic material and methods of using same | — | 2001-06-05 |
| 6239028 | Methods for forming iridium-containing films on substrates | — | 2001-05-29 |
| 6225237 | Method for forming metal-containing films using metal complexes with chelating O- and/or N-donor ligands | — | 2001-05-01 |
| 6217645 | Method of depositing films by using carboxylate complexes | — | 2001-04-17 |
| 6214729 | Metal complexes with chelating C-, N-donor ligands for forming metal-containing films | Stefan Uhlenbrock | 2001-04-10 |