Issued Patents All Time
Showing 51–75 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294556 | Method of forming trench isolation in the fabrication of integrated circuitry | — | 2007-11-13 |
| 7273525 | Methods for forming phosphorus- and/or boron-containing silica layers on substrates | — | 2007-09-25 |
| 7271077 | Deposition methods with time spaced and time abutting precursor pulses | Eugene P. Marsh, Paul Castrovillo, Cem Basceri, Garo Derderian, Gurtej S. Sandhu | 2007-09-18 |
| 7253122 | Systems and methods for forming metal oxides using metal diketonates and/or ketoimines | — | 2007-08-07 |
| 7250367 | Deposition methods using heteroleptic precursors | Donald L. Westmoreland, Eugene P. Marsh, Stefan Uhlenbrock | 2007-07-31 |
| 7196007 | Systems and methods of forming refractory metal nitride layers using disilazanes | — | 2007-03-27 |
| 7125815 | Methods of forming a phosphorous doped silicon dioxide comprising layer | — | 2006-10-24 |
| 7122464 | Systems and methods of forming refractory metal nitride layers using disilazanes | — | 2006-10-17 |
| 7116042 | Flow-fill structures | — | 2006-10-03 |
| 7115528 | Systems and method for forming silicon oxide layers | Timothy A. Quick | 2006-10-03 |
| 7115166 | Systems and methods for forming strontium- and/or barium-containing layers | Stefan Uhlenbrock | 2006-10-03 |
| 7112485 | Systems and methods for forming zirconium and/or hafnium-containing layers | — | 2006-09-26 |
| 7112122 | Methods and apparatus for removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2006-09-26 |
| 7101779 | Method of forming barrier layers | Donald L. Westmoreland | 2006-09-05 |
| 7087481 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Timothy A. Quick | 2006-08-08 |
| 7077902 | Atomic layer deposition methods | — | 2006-07-18 |
| 7041609 | Systems and methods for forming metal oxides using alcohols | — | 2006-05-09 |
| 7030042 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Timothy A. Quick | 2006-04-18 |
| 6995081 | Systems and methods for forming tantalum silicide layers | — | 2006-02-07 |
| 6984592 | Systems and methods for forming metal-doped alumina | — | 2006-01-10 |
| 6979370 | Methods, complexes, and system for forming metal-containing films | — | 2005-12-27 |
| 6967159 | Systems and methods for forming refractory metal nitride layers using organic amines | — | 2005-11-22 |
| 6958300 | Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides | Donald L. Westmoreland | 2005-10-25 |
| 6872420 | Methods for preparing ruthenium and osmium compounds and films | Stefan Uhlenbrock | 2005-03-29 |
| 6863725 | Method of forming a Ta2O5 comprising layer | Trung T. Doan | 2005-03-08 |