Issued Patents All Time
Showing 26–50 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943501 | Systems and methods of forming tantalum silicide layers | — | 2011-05-17 |
| 7902099 | Dielectric layers and memory cells including metal-doped alumina | — | 2011-03-08 |
| 7858815 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Timothy A. Quick | 2010-12-28 |
| 7790632 | Methods of forming a phosphorus doped silicon dioxide-comprising layer | — | 2010-09-07 |
| 7723907 | Flow-fill spacer structures for flat panel display device | — | 2010-05-25 |
| 7683001 | Dielectric layers and memory cells including metal-doped alumina | — | 2010-03-23 |
| 7678708 | Systems and methods for forming metal oxide layers | Timothy A. Quick | 2010-03-16 |
| 7666801 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Timothy A. Quick | 2010-02-23 |
| 7648926 | Systems and methods for forming metal oxides using metal diketonates and/or ketoimines | — | 2010-01-19 |
| 7576378 | Systems and methods for forming metal oxides using metal diketonates and/or ketoimines | — | 2009-08-18 |
| 7560815 | Device structures including ruthenium silicide diffusion barrier layers | Eugene P. Marsh | 2009-07-14 |
| 7560393 | Systems and methods of forming refractory metal nitride layers using disilazanes | — | 2009-07-14 |
| 7544615 | Systems and methods of forming refractory metal nitride layers using organic amines | — | 2009-06-09 |
| 7524410 | Methods and apparatus for removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2009-04-28 |
| 7488386 | Atomic layer deposition methods and chemical vapor deposition methods | — | 2009-02-10 |
| 7482284 | Deposition methods for forming silicon oxide layers | Timothy A. Quick | 2009-01-27 |
| 7473662 | Metal-doped alumina and layers thereof | — | 2009-01-06 |
| 7439195 | Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands | Timothy A. Quick | 2008-10-21 |
| 7410918 | Systems and methods for forming metal oxides using alcohols | — | 2008-08-12 |
| 7374617 | Atomic layer deposition methods and chemical vapor deposition methods | — | 2008-05-20 |
| 7368402 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds | Timothy A. Quick | 2008-05-06 |
| 7332442 | Systems and methods for forming metal oxide layers | Timothy A. Quick | 2008-02-19 |
| 7332032 | Precursor mixtures for use in preparing layers on substrates | — | 2008-02-19 |
| 7327034 | Compositions for planarization of metal-containing surfaces using halogens and halide salts | — | 2008-02-05 |
| 7300870 | Systems and methods of forming refractory metal nitride layers using organic amines | — | 2007-11-27 |