Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969683 | Method of preventing resist poisoning in dual damascene structures | Rongxiang Hu, Yongbae Kim, Sang-Yun Lee, Hiroaki Takikawa, Sarah Neuman +5 more | 2005-11-29 |
| 6713386 | Method of preventing resist poisoning in dual damascene structures | Rongxiang Hu, Yongbae Kim, Sang-Yun Lee, Hiroaki Takikawa, Sarah Neuman +5 more | 2004-03-30 |
| 6458508 | Method of protecting acid-catalyzed photoresist from chip-generated basic contaminants | Nicholas F. Pasch, Colin D. Yates | 2002-10-01 |
| 6425117 | System and method for performing optical proximity correction on the interface between optical proximity corrected cells | Nicholas F. Pasch, Nicholas K. Eib, Colin D. Yates | 2002-07-23 |
| 6239499 | Consistent alignment mark profiles on semiconductor wafers using PVD shadowing | Joe W. Zhao, Wilbur G. Catabay | 2001-05-29 |
| 6157087 | Consistent alignment mark profiles on semiconductor wafers using metal organic chemical vapor deposition titanium nitride protective layer | Joe W. Zhao, Keith K. Chao | 2000-12-05 |
| 6060787 | Consistent alignment mark profiles on semiconductor wafers using fine grain tungsten protective layer | Joe W. Zhao, Keith K. Chao | 2000-05-09 |
| 5981352 | Consistent alignment mark profiles on semiconductor wafers using fine grain tungsten protective layer | Joe W. Zhao, Keith K. Chao | 1999-11-09 |
| 5966613 | Consistent alignment mark profiles on semiconductor wafers using metal organic chemical vapor deposition titanium nitride protective | Joe W. Zhao, Keith K. Chao | 1999-10-12 |
| 5926720 | Consistent alignment mark profiles on semiconductor wafers using PVD shadowing | Joe W. Zhao, Wilbur G. Catabay | 1999-07-20 |
| 5863825 | Alignment mark contrast enhancement | Nicholas F. Pasch, Marilyn Hwan, Richard S. Osugi, Colin D. Yates, Dawn M. Lee | 1999-01-26 |