Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6114215 | Generating non-planar topology on the surface of planar and near-planar substrates | Ronald J. Nagahara | 2000-09-05 |
| 6066266 | In-situ chemical-mechanical polishing slurry formulation for compensation of polish pad degradation | Ronald J. Nagahara, Dawn M. Lee | 2000-05-23 |
| 5863825 | Alignment mark contrast enhancement | Nicholas F. Pasch, Marilyn Hwan, Colin D. Yates, Dawn M. Lee, Shumay X. Dou | 1999-01-26 |