Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6577665 | Molecular fluorine laser | Juergen Kleinschmidt | 2003-06-10 |
| 6577663 | Narrow bandwidth oscillator-amplifier system | — | 2003-06-10 |
| 6526085 | Performance control system and method for gas discharge lasers | Peter Heist | 2003-02-25 |
| 6504861 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2003-01-07 |
| 6493370 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-12-10 |
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Frank Voss, Rainer Patzel | 2002-12-03 |
| 6490307 | Method and procedure to automatically stabilize excimer laser output parameters | Bruno Becker de Mos, Uwe Stamm | 2002-12-03 |
| 6490308 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Frank Voss, Rainer Patzel | 2002-11-26 |
| 6389052 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-05-14 |
| 6330267 | Performance control system and method for gas discharge lasers | Peter Heist | 2001-12-11 |
| 6327290 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Frank Voss, Rainer Patzel | 2001-12-04 |
| 6272158 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Peter Lokai | 2001-08-07 |
| 6212214 | Performance control system and method for gas discharge lasers | Peter Heist | 2001-04-03 |
| 6160832 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Peter Lokai | 2000-12-12 |
| 5835647 | Device for generating a laser beam having a homogenized cross section and use of this beam | Manfred Fischer, Maximilian Reindl, Jorn Sander | 1998-11-10 |