Issued Patents All Time
Showing 101–106 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399507 | Stable plasma process for etching of films | Padmapani Nallan, John Holland, Valentin Todorov | 2002-06-04 |
| 6284665 | Method for controlling the shape of the etch front in the etching of polysilicon | Michael N. Grimbergen | 2001-09-04 |
| 6228208 | Plasma density and etch rate enhancing semiconductor processing chamber | Alan Ouye | 2001-05-08 |
| 6137110 | Focused ion beam source method and apparatus | Michael J. Pellin, Keith R. Lykke | 2000-10-24 |
| 6081334 | Endpoint detection for semiconductor processes | Michael N. Grimbergen | 2000-06-27 |
| 6074954 | Process for control of the shape of the etch front in the etching of polysilicon | Michael N. Grimbergen | 2000-06-13 |