Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9334566 | Multi-tray ballast vapor draw systems | Davis Weymann | 2016-05-10 |
| 9236244 | Sequential precursor dosing in an ALD multi-station/batch reactor | Adrien LaVoie, Damien Slevin, Karl Leeser | 2016-01-12 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Tom Dorsh, Dennis M. Hausmann +9 more | 2016-01-05 |
| 8985152 | Point of use valve manifold for semiconductor fabrication equipment | Chunguang Xia, Karl Leeser, Damien Slevin, Thomas G. Jewell | 2015-03-24 |
| 8940646 | Sequential precursor dosing in an ALD multi-station/batch reactor | Adrien LaVoie, Damien Slevin, Karl Leeser | 2015-01-27 |
| 8728956 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Tom Dorsh, Dennis M. Hausmann +9 more | 2014-05-20 |