Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078591 | Process for optimizing cobalt electrofill using sacrificial oxidants | Lee J. Brogan, Matthew A. Rigsby, Jonathan D. Reid | 2021-08-03 |
| 10329683 | Process for optimizing cobalt electrofill using sacrificial oxidants | Lee J. Brogan, Matthew A. Rigsby, Jonathan D. Reid | 2019-06-25 |
| 9865501 | Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer | Tighe A. Spurlin, George Andrew Antonelli, James E. Duncan, Jonathan D. Reid, David W. Porter | 2018-01-09 |
| 9777386 | Chemistry additives and process for cobalt film electrodeposition | Matthew A. Rigsby, Jonathan D. Reid | 2017-10-03 |
| 7799684 | Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafers | Jonathan D. Reid, Seyang Park, Seshasayee Varadarajan | 2010-09-21 |