Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799141 | Method and system for using a two-phases substrate cleaning compound | Mikhail Korolik, Erik M. Freer, John M. de Larios, Mike Ravkin, Fritz Redeker | 2010-09-21 |
| 7743449 | System and method for a combined contact and non-contact wafer cleaning module | Michael Ravkin, John deLarios | 2010-06-29 |
| 7737097 | Method for removing contamination from a substrate and for making a cleaning solution | Erik M. Freer, John M. de Larios, Michael Ravkin, Mikhail Korolik, Fred C. Redeker | 2010-06-15 |
| 7696141 | Cleaning compound and method and system for using the cleaning compound | Erik M. Freer, John M. de Larios, Michael Ravkin, Mikhail Korolik, Fred C. Redeker | 2010-04-13 |
| 7648584 | Method and apparatus for removing contamination from substrate | Erik M. Freer, John M. de Larios, Michael Ravkin, Mikhail Korolik, Fred C. Redeker +2 more | 2010-01-19 |
| 7067016 | Chemically assisted mechanical cleaning of MRAM structures | Michael Ravkin | 2006-06-27 |
| 7032269 | Brush scrubbing-high frequency resonating substrate processing system | Fritz Redeker | 2006-04-25 |
| 7007333 | System and method for a combined contact and non-contact wafer cleaning module | Michael Ravkin, John deLarios | 2006-03-07 |
| 6951042 | Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same | Fritz Redeker | 2005-10-04 |
| 6949411 | Method for post-etch and strip residue removal on coral films | Michael Ravkin, John deLarios | 2005-09-27 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, John deLarios, Afshin Nickhou, James P. Garcia | 2005-02-08 |
| 6770151 | Drying a substrate using a combination of substrate processing technologies | Michael Ravkin, John deLarios | 2004-08-03 |
| 6733596 | Substrate cleaning brush preparation sequence, method, and system | Michael Ravkin | 2004-05-11 |
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Mike Ravkin, John M. de Larios | 2003-08-26 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Vladislav V. Yakovlev, Mike Ravkin, John M. de Larios | 2003-02-18 |