Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720247 | Pre-pattern surface modification for low-k dielectrics using A H2 plasma | Brian K. Kirkpatrick, Michael Morrison, Kenneth Newton, Dirk N. Anderson | 2004-04-13 |
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Robert J. Kraft, Hyesook Hong | 2003-09-16 |