Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8524606 | Chemical mechanical planarization with overburden mask | Leslie M. Charns, John M. Cotte, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more | 2013-09-03 |
| 8513127 | Chemical mechanical planarization processes for fabrication of FinFET devices | Josephine B. Chang, Leslie M. Charns, Jason E. Cummings, Michael A. Guillorn, Lukasz J. Hupka +7 more | 2013-08-20 |
| 8507383 | Fabrication of replacement metal gate devices | Takashi Ando, Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more | 2013-08-13 |
| 8497210 | Shallow trench isolation chemical mechanical planarization | Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli, Tomohisa Konno +5 more | 2013-07-30 |
| 8268403 | Method for forming organic silica film, organic silica film, wiring structure, semiconductor device, and composition for film formation | Masahiro Akiyama, Hisashi Nakagawa, Atsushi Shiota, Takahiko Kurosawa | 2012-09-18 |
| 7893538 | Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device | Hisashi Nakagawa, Masahiro Akiyama, Terukazu Kokubo, Youhei Nobe | 2011-02-22 |
| 7556860 | Laminate and method of forming the same, insulating film, and semiconductor device | Masahiro Akiyama, Seitaro Hattori, Takahiko Kurosawa, Manabu Sekiguchi, Terukazu Kokubo +2 more | 2009-07-07 |