Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7242477 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +4 more | 2007-07-10 |
| 5438413 | Process for measuring overlay misregistration during semiconductor wafer fabrication | Isaac Mazor, Yoram Uziel | 1995-08-01 |