Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5830041 | Method and apparatus for determining endpoint during a polishing process | Tamami Takahashi, Fumihiko Sakata, Norio Kimura, Atsushi Shigeta | 1998-11-03 |
| 5695601 | Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method | Atsushi Shigeta, Shiro Mishima, Hiromi Yajima, Riichirou Aoki | 1997-12-09 |
| 5653623 | Polishing apparatus with improved exhaust | Norio Kimura, Seiji Ishikawa, Atsushi Shigeta, Riichirou Aoki | 1997-08-05 |
| 5616063 | Polishing apparatus | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Shirou Mishima, Atsushi Shigeta +3 more | 1997-04-01 |
| 5597341 | Semiconductor planarizing apparatus | Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1997-01-28 |
| 5578531 | Method for manufacturing semiconductor device | Atsushi Shigeta, Hiroyuki Yano | 1996-11-26 |
| 5489336 | Apparatus for forming a silicon oxide film on a silicon wafer | Masami Watase, Shiro Mishima, Katsuya Okumura | 1996-02-06 |
| 5445996 | Method for planarizing a semiconductor device having a amorphous layer | Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1995-08-29 |
| 5398459 | Method and apparatus for polishing a workpiece | Katsuya Okumura, Tohru Watanabe, Riichirou Aoki, Hiroyuki Yano, Atsushi Shigeta +4 more | 1995-03-21 |
| 5395645 | Method for forming a silicon oxide film on a silicon waffer | Masami Watase, Shiro Mishima, Katsuya Okumura | 1995-03-07 |
| 5278104 | Semiconductor wafer carrier having a dust cover | Tohru Watanabe, Katsuya Okumura | 1994-01-11 |
| 5131546 | Semiconductor wafer support carrier | — | 1992-07-21 |