Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693023 | Ion implantation method and ion implantation equipment | Kyoichi Suguro | 2004-02-17 |
| 6646268 | Ion generation method and filament for ion generation apparatus | Kyoichi Suguro, Katsuya Okumura | 2003-11-11 |
| 6614033 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Katsuya Okumura | 2003-09-02 |
| 6541393 | Method for fabricating semiconductor device | Taro Sugizaki, Toshiro Nakanishi, Kyoichi Suguro | 2003-04-01 |
| 6465290 | Method of manufacturing a semiconductor device using a polymer film pattern | Kyoichi Suguro, Kouji Matsuo, Yasuhiko Sato, Hiromi Niiyama | 2002-10-15 |
| 6403452 | Ion implantation method and ion implantation equipment | Kyoichi Suguro | 2002-06-11 |
| 6376888 | Semiconductor device and method of manufacturing the same | Yoshitaka Tsunashima, Kyoichi Suguro, Kouji Matsuo, Toshihiko Iinuma | 2002-04-23 |
| 6335534 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Katsuya Okumura | 2002-01-01 |
| 5770512 | Semiconductor device | Masao Iwase, Kyoichi Suguro, Mitsuo Koike, Tadayuki Asaishi | 1998-06-23 |
| 5698869 | Insulated-gate transistor having narrow-bandgap-source | Makoto Yoshimi, Satoshi Inaba, Mamoru Terauchi, Naoyuki Shigyo, Yoshiaki Matsushita +8 more | 1997-12-16 |
| 5656859 | Semiconductor device | Masao Iwase, Kyoichi Suguro, Mitsuo Koike, Tadayuki Asaishi | 1997-08-12 |
| 5656820 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Kyoichi Suguro, Tatsuya Hatanaka | 1997-08-12 |
| 5640020 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Kyoichi Suguro, Tatsuya Hatanaka | 1997-06-17 |
| 5598025 | Semiconductor device comprises an impurity layer having boron ions in the form of clusters of icosahedron structure | Ichiro Mizushima, Masaharu Watanabe, Masahiko Yoshiki | 1997-01-28 |
| 5413943 | Semiconductor device and method of manufacturing the same | Ichiro Mizushima, Masaharu Watanabe, Masahiko Yoshiki | 1995-05-09 |