Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8648464 | Semiconductor device and manufacturing method thereof | Masayuki Kitamura, Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Akihiro Kajita +3 more | 2014-02-11 |
| 8637380 | Method of processing silicon and glass substrates using a laser peeling technique | Kazuyuki Higashi, Akiko Nomachi, Takeshi Ishizaki | 2014-01-28 |
| 8536706 | Method for fabricating semiconductor device and semiconductor device | Yumi Hayashi, Kei Watanabe, Noriaki Matsunaga, Shinichi Nakao, Makoto Wada +1 more | 2013-09-17 |
| 8487449 | Carbon nanotube interconnection and manufacturing method thereof | Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Masayuki Kitamura, Akihiro Kajita +2 more | 2013-07-16 |
| 8482126 | Semiconductor device | Makoto Wada, Yuichi Yamazaki, Akihiro Kajita | 2013-07-09 |
| 8344509 | Method for fabricating semiconductor device and semiconductor device | Yumi Hayashi, Kei Watanabe, Noriaki Matsunaga, Shinichi Nakao, Makoto Wada +1 more | 2013-01-01 |
| 8148274 | Semiconductor device having oxidized metal film and manufacture method of the same | Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita, Kazuyuki Higashi +5 more | 2012-04-03 |
| 8110497 | Method for manufacturing semiconductor device | Soichi Yamashita, Yasuyuki Sonoda, Hiroshi Toyoda, Masahiko Hasunuma | 2012-02-07 |
| 7994054 | Semiconductor device having oxidized metal film and manufacture method of the same | Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita, Kazuyuki Higashi +5 more | 2011-08-09 |
| 7791202 | Semiconductor device having oxidized metal film and manufacture method of the same | Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita, Kazuyuki Higashi +5 more | 2010-09-07 |
| 7675183 | Semiconductor device including an insulating film and insulating pillars and manufacturing method of the semiconductor device | Hiroshi Toyoda, Mitsuhiro Nakao, Masahiko Hasunuma, Hisashi Kaneko, Toshiaki Komukai | 2010-03-09 |
| 7399706 | Manufacturing method of semiconductor device | Seiichi Omoto, Tomio Katata, Kazuyuki Higashi, Hitomi Yamaguchi, Hirokazu Ezawa | 2008-07-15 |
| 7351656 | Semiconductor device having oxidized metal film and manufacture method of the same | Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita, Kazuyuki Higashi +5 more | 2008-04-01 |
| 6946387 | Semiconductor device and method for manufacturing the same | Junichi Wada, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2005-09-20 |
| 6933216 | Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same | Keiichi Sasaki, Nobuo Hayasaka, Katsuya Okumura, Hirotaka Nishino | 2005-08-23 |
| 6727593 | Semiconductor device with improved bonding | Hiroshi Toyoda, Mitsuhiro Nakao, Masahiko Hasunuma, Hisashi Kaneko, Toshiaki Komukai | 2004-04-27 |
| 6673704 | Semiconductor device and method of manufacturing the same | Junichi Wada, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2004-01-06 |
| 6538323 | Semiconductor device having an electrode structure comprising a conductive fine particle film | Keiichi Sasaki, Nobuo Hayasaka, Katsuya Okumura, Hirotaka Nishino | 2003-03-25 |
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2002-08-27 |
| 6423192 | Sputtering apparatus and film forming method | Junichi Wada, Hideto Matsuyama, Tomio Katata, Koichi Watanabe | 2002-07-23 |
| 6071810 | Method of filling contact holes and wiring grooves of a semiconductor device | Junichi Wada, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2000-06-06 |