Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545336 | Scanning electron microscopy system and pattern depth measurement method | Takahiro Nishihata, Mayuka Osaki, Takuma Yamamoto, Yusuke Iida | 2023-01-03 |
| 11302513 | Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus | Takahiro Nishihata, Mayuka Osaki, Takuma Yamamoto, Yusuke Iida, Chihiro Ida | 2022-04-12 |
| 10943048 | Defect inspection apparatus and defect inspection method | Kazuhiro Nojima, Tomohide Tezuka, Atsushi Onishi, Kazuhiro Yamada, Shigeki Nojima | 2021-03-09 |
| 9053904 | Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope | Takashi Ishii | 2015-06-09 |
| 8027812 | Charge trajectory calculating method, system, and program | — | 2011-09-27 |
| 7600213 | Pattern data verification method, pattern data creation method, exposure mask manufacturing method, semiconductor device manufacturing method, and computer program product | Shigeki Nojima | 2009-10-06 |
| 7302091 | Method and apparatus for determining defect detection sensitivity data, control method of defect detection apparatus, and method and apparatus for detecting defect of semiconductor devices | Takamitsu Nagai | 2007-11-27 |
| 5276805 | Image filing system which has retrieval data containing link information between image data | — | 1994-01-04 |
| 4622827 | Control apparatus for an air conditioner | Ryozo Jabami, Shigeru Matsuda, Yasuyuki Ejima | 1986-11-18 |