Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277893 | Chemical vapor deposition apparatus | Tatsuya Ohori, Kazushige Shiina, Yasushi Iyechika, Noboru Suda, Yoshiyasu Ishihama +2 more | 2012-10-02 |
| 7489857 | Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process | Koji Kiriyama, Akira Asano, Takafumi Ishii | 2009-02-10 |
| 7297322 | Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process | Koji Kiriyama, Akira Asano, Takafumi Ishii | 2007-11-20 |
| 7195795 | Material for forming insulation film and film-forming method with the use of the material | Takeo Yoneyama, Kazuaki Tonari, Nobumasa Soejima, Koji Kiriyama, Takafumi Ishii | 2007-03-27 |
| 7036801 | Vaporizer and apparatus for vaporizing and supplying | Kazuaki Tonari, Mitsuhiro Iwata, Koji Kiriyama, Akira Asano | 2006-05-02 |
| 6767402 | Method for vaporizing and supplying | Takeo Yoneyama, Mitsuhiro Iwata, Koji Kiriyama, Kiichirou Araya | 2004-07-27 |
| 6666921 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yuji Mori, Hong-Xing Wang, Yoshiyasu Ishihama, Yutaka Amijima | 2003-12-23 |
| 6638489 | Cleaning process and cleaning agent for harmful gas | Kenji Otsuka, Youji Nawa, Kazuaki Tonari | 2003-10-28 |
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yuji Mori, Hiroyuki Naoi, Hong-Xing Wang, Yoshiyasu Ishihama +1 more | 2003-07-15 |
| 6473563 | Vaporizer and apparatus for vaporizing and supplying | Takeo Yoneyama, Koji Kiriyama, Akira Asano, Kazuaki Tonari, Mitsuhiro Iwata | 2002-10-29 |
| 6461407 | Method and apparatus for supplying liquid raw material | Takeo Yoneyama, Yoshiyasu Ishihama, Akira Asano | 2002-10-08 |
| 6155540 | Apparatus for vaporizing and supplying a material | Takeo Yoneyama, Yoshiyasu Ishihama | 2000-12-05 |
| 6106898 | Process for preparing nitride film | Takeo Yoneyama, Yoshiyasu Ishihama | 2000-08-22 |
| 6100415 | Purified alkoxide and process for purifying crude alkoxide | Takeo Yoneyama, Yoshiyasu Ishihama | 2000-08-08 |
| 5468894 | Method of manufacturing FSi(OR).sub.3 | Ryuichi Yamaguchi, Koichi Kiso, Kiyoshi Tazuke, Hideaki Machida, Katsuhiro Mihirogi | 1995-11-21 |