Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8679254 | Vapor phase epitaxy apparatus of group III nitride semiconductor | Kenji Iso, Ryohei Takaki, Yuzuru Takahashi | 2014-03-25 |
| 8277893 | Chemical vapor deposition apparatus | Tatsuya Ohori, Kazushige Shiina, Yasushi Iyechika, Noboru Suda, Yukichi Takamatsu +2 more | 2012-10-02 |
| 6666921 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hong-Xing Wang, Yutaka Amijima | 2003-12-23 |
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hiroyuki Naoi, Hong-Xing Wang +1 more | 2003-07-15 |
| 6461407 | Method and apparatus for supplying liquid raw material | Yukichi Takamatsu, Takeo Yoneyama, Akira Asano | 2002-10-08 |
| 6155540 | Apparatus for vaporizing and supplying a material | Yukichi Takamatsu, Takeo Yoneyama | 2000-12-05 |
| 6106898 | Process for preparing nitride film | Yukichi Takamatsu, Takeo Yoneyama | 2000-08-22 |
| 6100415 | Purified alkoxide and process for purifying crude alkoxide | Yukichi Takamatsu, Takeo Yoneyama | 2000-08-08 |