Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499247 | Vapor-liquid reaction device, reaction tube, film forming apparatus | Akinori Koukitu, Hisashi Murakami, Akira Yamaguchi, Hayato Shimamura | 2022-11-15 |
| 8277893 | Chemical vapor deposition apparatus | Tatsuya Ohori, Yasushi Iyechika, Noboru Suda, Yukichi Takamatsu, Yoshiyasu Ishihama +2 more | 2012-10-02 |
| 6837940 | Film-forming device with a substrate rotating mechanism | Junji Komeno | 2005-01-04 |
| 5833754 | Deposition apparatus for growing a material with reduced hazard | Hiromi Ito, Tatsuya Ohori, Hitoshi Tanaka, Nobuaki Tomesakai | 1998-11-10 |