Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666921 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hong-Xing Wang, Yoshiyasu Ishihama | 2003-12-23 |
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hiroyuki Naoi, Hong-Xing Wang +1 more | 2003-07-15 |
| 6447576 | Cleaning agent and cleaning process of harmful gas | Kenji Otsuka, Ryuji Hasemi, Youji Nawa | 2002-09-10 |
| 6325841 | Purifying agent and purification method for halogen-containing exhaust gas | Kenji Otsuka, Satoshi Arakawa, Ryuji Hasemi, Norihiro Suzuki | 2001-12-04 |