Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hong-Xing Wang, Yoshiyasu Ishihama +1 more | 2003-07-15 |