Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277893 | Chemical vapor deposition apparatus | Tatsuya Ohori, Kazushige Shiina, Yasushi Iyechika, Noboru Suda, Yukichi Takamatsu +2 more | 2012-10-02 |
| 7195795 | Material for forming insulation film and film-forming method with the use of the material | Yukichi Takamatsu, Kazuaki Tonari, Nobumasa Soejima, Koji Kiriyama, Takafumi Ishii | 2007-03-27 |
| 6767402 | Method for vaporizing and supplying | Yukichi Takamatsu, Mitsuhiro Iwata, Koji Kiriyama, Kiichirou Araya | 2004-07-27 |
| 6473563 | Vaporizer and apparatus for vaporizing and supplying | Yukichi Takamatsu, Koji Kiriyama, Akira Asano, Kazuaki Tonari, Mitsuhiro Iwata | 2002-10-29 |
| 6461407 | Method and apparatus for supplying liquid raw material | Yukichi Takamatsu, Yoshiyasu Ishihama, Akira Asano | 2002-10-08 |
| 6155540 | Apparatus for vaporizing and supplying a material | Yukichi Takamatsu, Yoshiyasu Ishihama | 2000-12-05 |
| 6106898 | Process for preparing nitride film | Yukichi Takamatsu, Yoshiyasu Ishihama | 2000-08-22 |
| 6100415 | Purified alkoxide and process for purifying crude alkoxide | Yukichi Takamatsu, Yoshiyasu Ishihama | 2000-08-08 |