Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786762 | Gate electrode of a semiconductor device, and method for producing same | Hiromu Yamaguchi | 2017-10-10 |
| 9496267 | Method for manufacturing semiconductor device | Yuki Togashi | 2016-11-15 |
| 8710624 | Semiconductor device | — | 2014-04-29 |
| 8178428 | Manufacturing method of semiconductor device and substrate processing apparatus | Takaaki Noda, Jie Wang, Satoru Sugiyama | 2012-05-15 |
| 7195795 | Material for forming insulation film and film-forming method with the use of the material | Yukichi Takamatsu, Takeo Yoneyama, Nobumasa Soejima, Koji Kiriyama, Takafumi Ishii | 2007-03-27 |
| 7036801 | Vaporizer and apparatus for vaporizing and supplying | Yukichi Takamatsu, Mitsuhiro Iwata, Koji Kiriyama, Akira Asano | 2006-05-02 |
| 6638489 | Cleaning process and cleaning agent for harmful gas | Kenji Otsuka, Yukichi Takamatsu, Youji Nawa | 2003-10-28 |
| 6473563 | Vaporizer and apparatus for vaporizing and supplying | Yukichi Takamatsu, Takeo Yoneyama, Koji Kiriyama, Akira Asano, Mitsuhiro Iwata | 2002-10-29 |