| 11869742 |
X-ray source with rotating liquid-metal target |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2024-01-09 |
| 11252810 |
Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2022-02-15 |
| 10887973 |
High brightness laser-produced plasma light source |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2021-01-05 |
| 10753798 |
Compact wideband VUV spectrometer |
Dmitriy Borisovich Abramenko, Vladimir Mikhailovich Krivtsun, Aleksander Petrovich Shevelko |
2020-08-25 |
| 10638588 |
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +3 more |
2020-04-28 |
| 10588210 |
High brightness short-wavelength radiation source (variants) |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2020-03-10 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more |
2016-10-25 |
| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili +3 more |
2016-04-05 |
| 8294128 |
Apparatus with plasma radiation source and method of forming a beam of radiation |
Vladimir Mihailovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev +1 more |
2012-10-23 |
| 7825390 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
Vladimir Mihallovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev +1 more |
2010-11-02 |