Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712525 | Packaging MEMS in fluidic environments | Albert Ting, Daniel T. McCormick | 2020-07-14 |
| 9018724 | Method of producing optical MEMS | Albert Ting, Daniel T. McCormick | 2015-04-28 |
| 7618548 | Silicon-containing structure with deep etched features, and method of manufacture | Jeffrey D. Chinn, Nicholas Pornsin-Sirirak, Yanping Li | 2009-11-17 |
| 7074723 | Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system | Jeffrey D. Chinn, Nicholas Pornsin-Sirirak, Yanping Li | 2006-07-11 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Jeffrey D. Chinn, James A. Cooper, Rolf Guenther | 2005-05-31 |
| 6849554 | Method of etching a deep trench having a tapered profile in silicon | Jeffrey D. Chinn | 2005-02-01 |
| 6846746 | Method of smoothing a trench sidewall after a deep trench silicon etch process | Jeffrey D. Chinn | 2005-01-25 |
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |