Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429418 | Phase-resolved optical metrology for substrates | Nedal Saleh, Xiaodong Zhang, Arun Ramaswamy SRIVATSA | 2025-09-30 |
| 10088413 | Spectral matching based calibration | Hidong Kwak, Ward Dixon, Kenneth Edward James, Jr., Leonid Poslavsky, Torsten R. Kaack | 2018-10-02 |
| 8711349 | High throughput thin film characterization and defect detection | Xiang Gao, Philip D. Flanner, III, Leonid Poslavsky, Jun YE, Torsten R. Kaack +1 more | 2014-04-29 |
| 7903250 | Control by sample reflectivity | Fabio A. Faccini, Torsten R. Kaack, Jiyou Fu | 2011-03-08 |