Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548402 | Method of depositing a thick titanium nitride film | Shulin Wang, Ming Xi, Frederick Wu, Ramanujapuram A. Srinivas, Zvi Lando +2 more | 2003-04-15 |
| 6436820 | Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å | Jianhua Hu, Yin Lin, Fufa Chen, Ming Xi | 2002-08-20 |