Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Shashank Sharma, Abhilash J. Mayur, Norman L. Tam, Matthew Spuller | 2025-06-10 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Kai Wu, Seshadri Ganguli, Norman L. Tam, Abhilash J. Mayur | 2024-01-02 |
| 11823901 | System and method for radical and thermal processing of substrates | Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2023-11-21 |
| 11587789 | System and method for radical and thermal processing of substrates | Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller, Zeqiong Zhao | 2023-02-21 |
| 10347455 | Miniature circuit breaker capable of rapid breaking | — | 2019-07-09 |
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more | 2018-07-03 |